Kinetics of lamellar formation on sparsely stripped patterns.
Kinetics of lamellar formation on sparsely stripped patterns.
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DOI：
10.1063/1.4830396
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发表时间：
2013-11
期刊：
影响因子：
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通讯作者：
N. Xie;Weihua Li;Hong-dong Zhang;F. Qiu;A. Shi
中科院分区：
文献类型：
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作者：
N. Xie;Weihua Li;Hong-dong Zhang;F. Qiu;A. Shi
基于嵌段共聚物自组装的化学外延被认为是一种有前途的大规模实现有序图案的技术。在这里，我们研究了嵌段共聚物的层状形成的动力学稀疏剥离模式的方向下，使用细胞动力学模拟的时间依赖的金-朗道理论。首先，揭示了一个标度律与lamps的有序化时间，tp，相对于lamps和条纹图案的周期之间的多次波，这是一致的存在于lamps的体相的相关长度的幂律演化。其次，从动力学的角度估计了偏离整数倍的完全有序容忍窗口。有序时间和容忍窗口的结果对于相关的实验或应用具有重要意义。最后，通过探讨缺陷的演化，探讨了化学外延图形形成过程中的两个演化阶段，这对于我们理解嵌段共聚物在化学图形指导下的粗化动力学具有重要意义。
Chemical epitaxy based on the self-assembly of block copolymers is viewed as a promising technique to achieve ordered patterns on a large scale. Herein, we study the kinetics of lamellar formation of block copolymers under the direction of sparsely stripped patterns using cell dynamics simulations of the time-dependent Ginzburg-Landau theory. First, a scaling law is unveiled with the ordering time of lamellae, tp, with respect to the multiples between the periods of lamellae and stripe patterns, which is consistent with the power law evolution of the correlation length existing in the bulk phase of lamellae. Second, the tolerative windows of perfect order, with deviation from integer multiples, are also estimated from the aspect of kinetics. The results of the ordering time and tolerative windows are of great interest for relevant experiments or applications. Finally, a two-stage evolution is explored during the pattern formation of chemical epitaxy by probing into the evolution of defects, which is of fundamental interest for us to understand the coarsening kinetics of block copolymers under the direction of chemical patterns.