Electrolyte Based Thermal to Electric Energy Conversion Utilising 10 nm Diameter AL2O3 Nanochannels

Electrolyte Based Thermal to Electric Energy Conversion Utilising 10 nm Diameter AL2O3 Nanochannels
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DOI:
10.1109/memsys.2019.8870755
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发表时间:
2019-01
期刊:
2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)
影响因子:
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通讯作者:
Nguyen Van Toan;M. Hasnan;Daiki Udagawa;N. Inomata;M. Toda;S. Said;M. Sabri;T. Ono
Nguyen Van Toan;M. Hasnan;Daiki Udagawa;N. Inomata;M. Toda;S. Said;M. Sabri;T. Ono
中科院分区:
其他
文献类型:
--
作者:
Nguyen Van Toan;M. Hasnan;Daiki Udagawa;N. Inomata;M. Toda;S. Said;M. Sabri;T. Ono

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这项工作报告了基于温度梯度引起的纳米通道中的流体传输的热能到电能的转换。在稀酸电解溶液中通过阳极氧化工艺成功制备了直径为 10 nm、长度为 $3\ \mu \mathrm{m}$ 的阳极氧化铝 (AAO) 纳米通道。使用上述 AAO 纳米通道的热能到电能的转换已经得到证实。所制造器件的最大功率输出为 12.2 nW,负载电阻为 $47\ \mathrm{k}\Omega$,温度梯度为 17°C。所制造的器件可在 30°C 的温度梯度下产生 $255\ \mu \mathrm{W}/\text{cm}^{2}$ 的功率密度
This work reports the thermal to electric energy conversion based on fluidic transport in nanochannels inducted by temperature gradient. Anodized aluminum oxide (AAO) nanochannels with 10 nm-diameter and $3\ \mu \mathrm{m}$-length are successfully fabricated by anodic oxidation process in a diluted acid electrolytic solution. Thermal to electric energy conversion using above AAO nanochannels has been demonstrated. Maximum power output of the fabricated device is found at 12.2 nW with the load resistance of $47\ \mathrm{k}\Omega$ and temperature gradient of 17°C. The fabricated device can generate the power density of $255\ \mu \mathrm{W}/\text{cm}^{2}$ with temperature gradient of 30°C