Sensitivity enhancement of a MEMS sensor in nonlinear regime
Sensitivity enhancement of a MEMS sensor in nonlinear regime
复制标题
非线性状态下 MEMS 传感器的灵敏度增强
DOI：
10.1007/s10999-015-9310-5
复制
发表时间：
2016
影响因子：
3.7
通讯作者：
A. Khalkhali
中科院分区：
文献类型：
--
作者：
Araz Rezaei Kivi;S. Azizi;A. Khalkhali
本研究的目的是提高非线性状态下微机电陀螺仪的灵敏度。灵敏度的增强是通过施加适当的希望电压来实现的，该电压将微束推至所需周期性吸引子的吸引盆。研究的模型是由静电电压驱动的硅夹钳微梁，该静电电压是驱动模式方向上的恒定直流电压和谐波交流电压以及感测模式方向上的纯直流电压的组合。绕水平轴的外部角速度用于沿传感模式产生科里奥利力。利用哈密顿原理导出运动的控制微分方程，并利用伽辽金方法将其离散化为两个非线性杜芬型常微分方程。利用射击法获得频响曲线，捕捉运动的周期解。通过 Floquet 理论研究了周期轨道的稳定性。结果表明，系统的响应很大程度上受所施加的直流和交流电压的影响；对应于恒定的直流电压，交流电压越大，灵敏度越高。基于直流电压，系统表现出硬化和软化效果。确定了电容器的容量并研究了不同施加的希望电压对其容量的影响。获得了微梁对于各种品质因数的频率响应曲线，并与文献进行了比较。
The aim of this study is to enhance the sensitivity of a micro electro mechanical Gyroscope in nonlinear regime. Sensitivity enhancement is achieved by applying appropriate Hoping voltages which pushes the micro-beam to the basin of attraction of a desired periodic attractor. The studied model is a silicon clamped–clamped micro beam actuated by an electrostatic voltage which is a combination of a constant DC and a harmonic AC voltage in the drive mode direction and a pure DC voltage in the direction of sense mode. The external angular velocity about the horizontal axis is used to create the Coriolis force along the sense mode. The governing differential equation of the motion is derived using Hamiltonian principle and discretized to two nonlinear Duffing type ODE’s using Galerkin method. Shooting method is utilized to obtain the frequency response curve, and to capture the periodic solutions of the motion. The stabilities of the periodic orbits are investigated by the Floquet theory. The results depict that the response of the system is highly affected by the applied DC and AC voltage; corresponding to a constant DC voltage, the more is the AC voltage, the more is the sensitivity. Based on the DC voltage the system exhibits both hardening and softening effects. The capacity of the capacitors is determined and the effects of the various applying Hoping voltages on capacity of them are investigated. The frequency response curve of the micro-beam for various quality factors are obtained and compared with the literature.