Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization
Three-dimensional nanostructures by focused ion beam techniques: Fabrication and characterization
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DOI：
10.1557/jmr.2013.324
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发表时间：
2013-11
影响因子：
2.7
通讯作者：
Wuxia Li;C. Gu;Ajuan Cui;J. C. Fenton;Qianqing Jiang;P. Warburton;T. Shen
中科院分区：
文献类型：
--
作者：
Wuxia Li;C. Gu;Ajuan Cui;J. C. Fenton;Qianqing Jiang;P. Warburton;T. Shen
三维纳米结构和纳米器件由于其特殊的力学和物理性能在过去的几年里引起了人们极大的兴趣。使用三维纳米结构作为构建块的纳米器件已被证明具有传统平面器件无法实现的多功能和功能。在这篇文章中，我们分别报道和回顾了聚焦离子束技术用于三维纳米结构的直接位点特异性生长，以及离子束诱导化学气相沉积和离子束辐照诱导塑性弯曲的独立纳米结构的生长后形状修饰。这些技术已经在金属纳米电极、3D拾取线圈、纳米间隙和多分支结构的制造中显示出纳米级的分辨率和精度。所得到的纳米结构的表征表明，聚焦离子束技术允许导电和超导独立3D结构在尺寸、几何形状上进行定制，并与平面电子、机械和超导纳米器件集成，有可能实现芯片实验室实验。
Three-dimensional (3D) nanostructures and nanodevices have attracted tremendous interest in the past few years due to their special mechanical and physical properties. Nanodevices using 3D nanostructures as the building blocks have been demonstrated to exhibit multifunctionality and functions that conventional planar devices cannot achieve. In this article, we report and review focused ion beam techniques for direct site-specific growth of 3D nanostructures and postgrowth shape modification of freestanding nanostructures by ion beam-induced chemical vapor deposition and ion-beam-irradiation-induced plastic bending, respectively. Such techniques have shown nanometer-scale resolution and accuracy in the fabrication of metallic nanoelectrodes, 3D pickup coils, nanogaps, and multibranched structures. Characterization of the resulting nanostructures shows that focused ion beam techniques allow conducting and superconducting freestanding 3D structures to be tailored in size, geometry, and integrated with planar electronic, mechanical, and superconducting nanodevices, potentially enabling lab-on-a-chip experiments.