Investigating focus elongation using a spatial light modulator for high-throughput ultrafast-laser-induced selective etching in fused silica.
Investigating focus elongation using a spatial light modulator for high-throughput ultrafast-laser-induced selective etching in fused silica.
复制标题
研究使用空间光调制器在熔融石英中进行高通量超快激光诱导选择性蚀刻的焦点伸长。
DOI:
10.1364/oe.454280
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发表时间:
2022
期刊:
影响因子:
3.8
通讯作者:
McArthur SR
中科院分区:
文献类型:
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作者:
McArthur SR