Characterization and Modeling of K-Band Coplanar Waveguides Digitally Manufactured Using Pulsed Picosecond Laser Machining of Thick-Film Conductive Paste
Characterization and Modeling of K-Band Coplanar Waveguides Digitally Manufactured Using Pulsed Picosecond Laser Machining of Thick-Film Conductive Paste
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使用脉冲皮秒激光加工厚膜导电浆料数字化制造的 K 波段共面波导的表征和建模
DOI：
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发表时间：
2017
影响因子：
4.3
通讯作者：
T. Weller
中科院分区：
文献类型：
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作者：
E. Rojas;H. Tsang;P. Deffenbaugh;Ramiro A. Ramirez;D. Hawatmeh;A. Ross;K. Church;T. Weller
厚膜导电浆料的微点胶技术已被证明是制造微波平面传输线的可行方法。然而，这些线的性能和上频率范围受到印刷膏的横截面形状和导电性以及可实现的最小特征尺寸（通常约为100 μ m）的限制<inline-formula><tex-math notation="LaTeX"> ext{m}$</tex-math></inline-formula>。本文用皮秒Nd：YAG激光器加工了20-25-<inline-formula><tex-math notation="LaTeX">$μ m的槽 在</tex-math></inline-formula>Rogers RT 5870基板上微点胶的一层银膏（Dupont CB 028），可产生16- 20 μ m的共面波导（CPW）传输线<inline-formula><tex-math notation="LaTeX"> ext{m}$</tex-math></inline-formula>宽插槽。结果表明，激光固化约2-<inline-formula><tex-math notation="LaTeX">5 μ ext{m}$</tex-math></inline-formula>-槽边缘的宽区域，从而显着增加薄膜的有效电导率并提高线路的衰减常数。激光加工的CB 028在20 GHz处提取的衰减常数为0.74 dB/cm。共面波导谐振器和滤波器表明，有效电导率在10至30 MS/m的范围内，这代表了<inline-formula><tex-math notation="LaTeX">100美元 当</tex-math></inline-formula>与单独使用微分配获得的值相比时，获得了10倍的改进。本文表明，增材制造和激光加工的混合方法能够制造性能更高的高频电路（高达至少40 GHz）。
Microdispensing of thick-film conductive paste has been demonstrated as a viable approach for manufacturing microwave planar transmission lines. However, the performance and upper frequency range of these lines is limited by the cross-sectional shape and electrical conductivity of the printed paste, as well as the achievable minimum feature size which is typically around <inline-formula> <tex-math notation="LaTeX">$100~mu ext{m}$ </tex-math></inline-formula>. In this paper, a picosecond Nd:YAG laser is used to machine slots in a 20–25-<inline-formula> <tex-math notation="LaTeX">$mu ext{m}$ </tex-math></inline-formula>-thick layer of silver paste (Dupont CB028) that is microdispensed on a Rogers RT5870 substrate, producing coplanar waveguide (CPW) transmission lines with 16–<inline-formula> <tex-math notation="LaTeX">$20~mu ext{m}$ </tex-math></inline-formula>-wide slots. It is shown that the laser solidifies an about 2-<inline-formula> <tex-math notation="LaTeX">$mu ext{m}$ </tex-math></inline-formula>-wide region of the edges of the slots, thus significantly increasing the effective conductivity of the film and improving the attenuation constant of the lines. The extracted attenuation constant at 20 GHz for laser machined CB028 is 0.74 dB/cm. CPW resonators and filters show that the effective conductivity is in the range from 10 to 30 MS/m, which represents a <inline-formula> <tex-math notation="LaTeX">$100 imes $ </tex-math></inline-formula> improvement when compared to the values obtained with the exclusive use of microdispensing. This paper demonstrates that a hybrid approach of additive manufacturing and laser machining enables the fabrication of higher frequency circuits (up to at least 40 GHz) with improved performance.