Hybrid-integrated chalcogenide photonics
Hybrid-integrated chalcogenide photonics
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DOI：
10.37188/lam.2023.024
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发表时间：
2023
期刊：
影响因子：
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通讯作者：
Bin Zhang;Di Xia;Xin Zhao;Lei Wan;Zhaohui Li
中科院分区：
文献类型：
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作者：
Bin Zhang;Di Xia;Xin Zhao;Lei Wan;Zhaohui Li
高质量的光子材料对于促进具有宽带宽、高效率和大容量芯片级制造的灵活性的集成光子器件至关重要。最近，我们设计了一种用于光学信息处理芯片和系统的硫系玻璃（ChG）- Ge 25 Sb 10 S65（GeSbS），它具有超宽的透射窗口、高的克尔非线性和光弹系数，并与硅光子学的光子混合集成技术兼容。采用改进的纳米纤维工艺制备了具有高品质因数和光刻控制精细结构的芯片集成GeSbS微谐振器和微谐振器阵列。此外，考虑到ChG的高克尔非线性和光弹效应，我们实现了一种新型的ChG混合集成芯片，灵感来自集成孤子微梳和声光（AO）调制器的最新进展。
High-quality photonic materials are critical for promoting integrated photonic devices with broad bandwidths, high efficiencies, and flexibilities for high-volume chip-scale fabrication. Recently, we designed a home-developed chalcogenide glass (ChG)- Ge 25 Sb 10 S 65 (GeSbS) for optical information processing chips and systems, which featured an ultrabroad transmission window, a high Kerr nonlinearity and photoelastic coefficient, and compatibility with the photonic hybrid integration technology of silicon photonics. Chip-integrated GeSbS microresonators and microresonator arrays with high quality factors and lithographically controlled fine structures were fabricated using a modified nanofabrication process. Moreover, considering the high Kerr nonlinearity and photoelastic effect of ChGs, we realised a novel ChG hybrid integrated chip, inspired by recent advances in integrated soliton microcombs and acousto-optic (AO) modulators.