A simulation study of impacts of global and local space variations on lifetime distribution in MOL/BEOL TDDB
A simulation study of impacts of global and local space variations on lifetime distribution in MOL/BEOL TDDB
复制标题
MOL/BEOL TDDB 中全局和局部空间变化对寿命分布影响的模拟研究
DOI:
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发表时间:
2015
期刊:
影响因子:
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通讯作者:
Shinji Yokogawa
中科院分区:
文献类型:
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作者:
H. Ichikawa;A. Ahmed;H. Hanafusa;S. Yokogawa;Y. Kawakita;K. Sawada;H. Mikami;N. Yoshikawa;西本伸志,上口貴志,黄田育宏,劉国相;Shinji Yokogawa