The quartz crystal microbalance: mass sensitivity, viscoelasticity and acoustic amplification
The quartz crystal microbalance: mass sensitivity, viscoelasticity and acoustic amplification
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DOI：
10.1016/s0925-4005(00)00550-5
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发表时间：
2000-11-01
影响因子：
8.4
通讯作者：
Hauptmann, P
中科院分区：
文献类型：
--
作者：
Lucklum, R;Hauptmann, P
石英晶体谐振器(QCR)对其表面涂覆的薄膜的表面质量和材料特性做出响应。作用在谐振器表面的声学载荷是描述这种依赖关系的更一般的参数。它可以用质量系数和声学系数来表示。在涂层的损耗正切已知的情况下，可以利用电阻增大和频移的商来确定声学因子。敏感涂层的粘弹性特性可以提高石英晶体微天平(QCM)传感器的质量灵敏度。在化学传感过程中，声学因素和声学放大效果是不同的，我们进一步提出了一种基于双层结构的传感器概念。将具有粘弹性薄膜和化学敏感性的声学放大分开。通过适当的材料选择，第一层实现了声学放大，而(化学)敏感层起到了纯粹的质量检测器的作用。传感器的主要设计参数是第一层的剪切模数和厚度；主要的挑战是制备均匀和均匀的第一Nm。(C)2000 Elsevier Science B.V.保留所有权利。
Quartz crystal resonators (QCR) respond to surface mass and material properties of a film coated on their surface. The acoustic load acting at the surface of the resonator is a more general parameter to describe this dependence. It can be represented by a mass factor and an acoustic factor. The quotient of resistance increase and frequency shift can be used for the determination of the acoustic factor, if the loss tangent of the coating is known. Viscoelastic properties of sensitive coatings can enhance the mass sensitivity of quartz crystal microbalance (QCM) sensors. Acoustic factor and acoustic amplification effective during chemical sensing are not the same.We further suggest a sensor concept, which is based on a bilayer arrangement. Acoustic amplification with a viscoelastic film and chemical sensitivity is separated. With a proper selection of materials, the first layer realizes acoustic amplification while the (chemical) sensitive layer acts as a pure mass detector. Major sensor design parameters are the shear modulus and the thickness of the first layer; major challenge is the preparation of a homogeneous and uniform first Nm. (C) 2000 Elsevier Science B.V. All rights reserved.