Cubical photonic structures by means of ion beam assisted robotic assembly
Cubical photonic structures by means of ion beam assisted robotic assembly
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DOI：
10.1109/nems.2016.7758248
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发表时间：
2016-04
期刊：
影响因子：
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通讯作者：
Waldemar Klauser;S. Zimmermann;M. Bartenwerfer;S. Fatikow
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文献类型：
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作者：
Waldemar Klauser;S. Zimmermann;M. Bartenwerfer;S. Fatikow
具有足够精度的定制光子结构的制造是几十年来光子学的主要课题。然而，到目前为止，组装光子结构以控制所有三个空间维度中的光传播仍然具有挑战性。本文提出了一种可靠的方法，用于制造由单独堆叠的胶体颗粒组成的三维结构。扫描电子显微镜内的机器人双探针设置和有目的地使用基于离子束的蚀刻和沉积技术的组合允许按需制造具有立方几何形状的三维光子结构。这种技术的优点和局限性突出相对于进一步的应用场景。
Fabrication of tailored photonic structures with sufficient precision is a major topic in photonics since decades. However, until now, the assembly of photonic structures in order to control light propagation in all three spatial dimensions remains challenging. This paper presents a reliable approach for fabricating three-dimensional structures consisting of individually stacked colloidal particles. The combination of a robotic dual-probe setup inside a scanning electron microscope and the purposeful use of ion beam based etching and deposition techniques allows to fabricate on-demand three-dimensional photonic structures with cubic geometry. The advantages and limits of this technique are highlighted with respect to further application scenarios.