Continuously-varying, three-dimensional SU-8 structures: fabrication of inclined magnetic actuators
Continuously-varying, three-dimensional SU-8 structures: fabrication of inclined magnetic actuators
复制标题
连续变化的三维 SU-8 结构：倾斜磁力致动器的制造
DOI：
10.1109/memsys.2002.984233
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发表时间：
2002
期刊：
影响因子：
--
通讯作者：
M. Allen
中科院分区：
文献类型：
--
作者：
Yoonsu Choi;Kieun Kim;M. Allen
发展了一种利用SU-8环氧胶制作三维连续变化三维结构的方法。用这种方法制作了一个高300平方英尺、倾角36度的斜坡道结构。在该工艺的扩展中，金属和介电材料都可以在倾斜表面上沉积和图案化。这些斜面结构的当前应用是制造相对于衬底具有明确倾斜的磁开关。这种开关是使用坡道结构作为底层机械支撑来制造的。具有倾斜取向的开关阵列能够响应于外部磁场在相同方向上一致地驱动。在磁激励下，该开关产生的接触电阻为5.1欧米茄/。
A fabrication approach using SU-8 epoxy photoresist to create three-dimensional structures with continuous variation in the third dimension has been developed. Using this approach, a ramp structure 300 /spl mu/m tall with an angle of inclination of 36 degrees has been fabricated. In an extension of the process, both metal and dielectric materials can be deposited and patterned on the inclined surface. The current application for these ramp structures is the fabrication of magnetic switches of well-defined inclination relative to the substrate. Such switches were produced using the ramp structures as an underlying mechanical support. Switch arrays with inclined orientation are able to actuate consistently in the same direction in response to external magnetic fields. Under magnetic actuation, the switch produced a contact resistance of 5.1 /spl Omega/.