On the Deembedding Issue of CMOS Multigigahertz Measurements
On the Deembedding Issue of CMOS Multigigahertz Measurements
复制标题
DOI：
10.1109/tmtt.2007.904041
复制
发表时间：
2007-09
影响因子：
4.3
通讯作者：
A. Issaoun;Yong Zhong Xiong;Jinglin Shi;J. Brinkhoff;F. Lin
中科院分区：
文献类型：
--
作者：
A. Issaoun;Yong Zhong Xiong;Jinglin Shi;J. Brinkhoff;F. Lin
本文的目的是解决的问题，去嵌入多千兆赫CMOS测量广泛比较六种流行的方法，并提出了一种新的方法，基于双端口测量。比较的目的是评估等效电路方法（开路短路，三步，…）的最大适用频率。以及MOSFET源极悬空引脚对级联方法（双线和直通）的影响。50个虚拟结构和12个MOSFET使用标准的0.18妈妈CMOS技术制造。结果发现，在低频（<6 GHz），所有方法的结果是可比的。开路短路方法在整个研究频率范围（0.1-40 GHz）内表现良好。新开发的方法，称为通短路方法，只使用两个虚拟结构，通和短，完全deembed的寄生从探针焊盘，互连，和半导体衬底。测量验证了直通短算法，并显示其有用的几千兆赫的晶圆CMOS测量。
The purpose of this paper is to address the issues of deembedding multigigahertz CMOS measurements by extensively comparing six popular methods and by proposing a new method based on two-port measurements. The comparison aims to evaluate the maximum applicable frequency of equivalent-circuit methods (open-short, three step, ...) and the effect of the source dangling leg of MOSFETs on the cascade methods (two line and thru). Fifty dummy structures and 12 MOSFETs were fabricated using standard 0.18-mum CMOS technology. It was found that, at low frequencies (<6 GHz), all method results were comparable. The open-short method performed well over the entire frequency range (0.1-40 GHz) studied. The newly developed method, called the thru-short method, uses only two dummy structures, a thru and a short, to completely deembed the parasitics from probe pads, interconnects, and the semiconducting substrate. The measurements validated the thru-short algorithm and showed its usefulness for multigigahertz on-wafer CMOS measurements.