Waferscale nanophotonic circuits made from diamond-on-insulator substrates.
Waferscale nanophotonic circuits made from diamond-on-insulator substrates.
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DOI：
10.1364/oe.21.011031
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发表时间：
2013-05
期刊：
影响因子：
3.8
通讯作者：
P. Rath;N. Gruhler;S. Khasminskaya;Christoph E. Nebel;Christoph Wild;W. Pernice
中科院分区：
文献类型：
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作者：
P. Rath;N. Gruhler;S. Khasminskaya;Christoph E. Nebel;Christoph Wild;W. Pernice
宽禁带介质是制作光子器件的理想材料，因为它们允许宽带光操作，不会受到自由载流子吸收的影响。在这里，我们展示了用化学气相沉积方法沉积的多晶金刚石薄膜为实现大规模集成光子电路提供了一个很有前途的平台。我们介绍了研究片上器件所需的全套光子元件，包括输入光栅耦合器、毫米长的纳米光子波导和微腔。在微环谐振器中，我们测量的负载光学品质因数高达11,000。通过对长波导传输的测量，也证实了相应的传输损耗为5分贝/毫米。
Wide bandgap dielectrics are attractive materials for the fabrication of photonic devices because they allow broadband optical operation and do not suffer from free-carrier absorption. Here we show that polycrystalline diamond thin films deposited by chemical vapor deposition provide a promising platform for the realization of large scale integrated photonic circuits. We present a full suite of photonic components required for the investigation of on-chip devices, including input grating couplers, millimeter long nanophotonic waveguides and microcavities. In microring resonators we measure loaded optical quality factors up to 11,000. Corresponding propagation loss of 5 dB/mm is also confirmed by measuring transmission through long waveguides.