Simultaneous Fabrication of Nanogaps Using Field-Emission-Induced Electromigration
Simultaneous Fabrication of Nanogaps Using Field-Emission-Induced Electromigration
复制标题
利用场发射诱导电迁移同时制造纳米间隙
DOI：
10.1109/3m-nano.2014.7057331
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
K. Morihara and J. Shirakashi
中科院分区：
文献类型：
--
作者：
M. Ito;M. Yagi;K. Morihara and J. Shirakashi
我们提出了一种简单易行的同时控制多个镍纳米间隙的电性能的技术。这种技术是基于由场发射电流引起的电迁移，即所谓的“激活”。通过使Fowler-Nordheim（F-N）场发射电流通过串联连接的三个初始Ni纳米间隙，同时实现纳米间隙的隧道电阻的调谐。通过电子束光刻和剥离工艺制备了初始间隙为80-110 nm的非对称形状的Ni纳米间隙。通过进行激活，串联连接的纳米间隙的电流-电压特性同时从“绝缘”到“金属”通过“隧穿”特性随着激活的预设电流的增加而变化。此外，当预置电流从1 nA增加到30 μA时，我们可以同时控制串联纳米间隙的隧道电阻在100 TΩ到100 kΩ的数量级。这种趋势与单独激活的纳米间隙的趋势非常相似，并且应该注意的是，同时激活的纳米间隙的隧道电阻在每个预设电流下几乎相同。这些结果清楚地表明，串联连接的纳米间隙的电性能可以同时控制的激活过程。
We present a simple and easy technique for the simultaneous control of electrical properties of multiple Ni nanogaps. This technique is based on electromigration induced by a field emission current, which is so-called “activation”. The tuning of tunnel resistance of nanogaps was simultaneously achieved by passing a Fowler-Nordheim (F-N) field emission current through three initial Ni nanogaps connected in series. The Ni nanogaps having an asymmetrical shape with an initial gap separation of 80-110 nm were fabricated by electron-beam (EB) lithography and lift-off process. By performing the activation, current-voltage properties of series-connected nanogaps were simultaneously varied from “insulating” to “metallic” through “tunneling” properties with increasing the preset current of the activation. Furthermore, we can simultaneously control the tunnel resistance of the series-connected nanogaps ranging from the order of 100 TΩ to 100 kΩ with increasing the preset current from 1 nA to 30 μA. This tendency is quite similar to that of individually activated nanogaps, and it should be noted that tunnel resistance of simultaneously activated nanogaps was almost the same at each preset current. These results clearly imply that the electrical properties of series-connected nanogaps can be simultaneously controlled by the activation procedure.