Ion beam synthesis of diamond-like carbon thin films containing copper nanocrystals
Ion beam synthesis of diamond-like carbon thin films containing copper nanocrystals
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离子束合成含铜纳米晶的类金刚石碳薄膜
DOI：
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发表时间：
2003
期刊：
影响因子：
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通讯作者：
H. Gibhardt
中科院分区：
文献类型：
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作者：
I. Gerhards;C. Ronning;H. Hofsäss;M. Seibt;H. Gibhardt
用质量选择离子束沉积法制备了含0-50原子%铜的非晶碳薄膜，在类金刚石基体中合成了孤立的铜纳米颗粒。拉曼光谱和X-射线光电子能谱表明，随着Cu含量的增加，基质的sp3含量减少。同时，嵌入的Cu纳米晶体的平均粒径增加，X射线衍射和透射电子显微镜分析显示。显然没有依赖的基体结构上的Cu+离子的能量，而Cu含量的强烈影响，由该沉积参数。
Amorphous carbon thin films containing 0–50 at. % Cu have been grown by mass selected ion beam deposition in order to synthesize isolated Cu nanoparticles within a diamond-like matrix. Raman spectroscopy and x-ray photoelectron spectroscopy show that the sp3 content of the matrix decreases with increasing Cu content. Simultaneously, the mean particle size of the embedded Cu nanocrystals increases, as x-ray diffraction and transmission electron microscopy analysis reveal. There is apparently no dependence of the matrix structure on the Cu+ ion energy, while the Cu content is strongly influenced by this deposition parameter.