High-resolution micro-fluxgate sensing elements using closely coupled coil structures
High-resolution micro-fluxgate sensing elements using closely coupled coil structures
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DOI：
10.1016/s0924-4247(97)80024-6
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发表时间：
1996-06-01
影响因子：
4.6
通讯作者：
Tadokoro, Y
中科院分区：
文献类型：
--
作者：
Kawahito, S;Satoh, H;Tadokoro, Y
本文介绍了高分辨率的微磁通门磁传感元件，使用磁性薄膜和紧密耦合的激励和拾取线圈的螺线管形线圈结构的基础上。为了提高敏感元件的灵敏度，研究了激励线圈与拾波线圈的最佳耦合结构和坡莫合金磁性薄膜的形成方法。紧密耦合的线圈结构允许磁芯在最佳条件下以减小的激励电流被激励。向坡莫合金镀液中添加铟大大减少了由于热处理工艺引起的磁芯退化。在3 Ml-Iz的激励频率下，测得所制造的传感元件的灵敏度为2700 V T-1。在直流至10 Hz带宽范围内，噪声电平或分辨率经测量约为40 nT（p-p）。
This paper describes high-resolution micro-fluxgate magnetic sensing elements using magnetic thin films and closely coupled excitation and pick-up coils based on a solenoid-shaped coil structure. In order to improve the sensitivity of the sensing element, the optimal coupling structure between excitation and pick-up coils, and the formation method of permalloy magnetic films are investigated. The closely coupled coil structure allows the magnetic core to be excited in an optimal condition with reduced excitation current. The addition of indium to the permalloy plating bath greatly reduces the degradation of the magnetic core due to the thermal treatment process. The sensitivity of the fabricated sensing element is measured to be 2700 V T-1 at an excitation frequency of 3 Ml-Iz. The noise level, or resolution, in d.c. to 10 Hz bandwidth is measured to br about 40 nT(p-p).