Proton-induced fixed positive charge at the Si(100)-SiO2 interface.
Proton-induced fixed positive charge at the Si(100)-SiO2 interface.
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DOI：
10.1103/physrevlett.99.126102
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发表时间：
2007-09
影响因子：
8.6
通讯作者：
J. Godet;F. Giustino;Alfredo Pasquarello
中科院分区：
文献类型：
--
作者：
J. Godet;F. Giustino;Alfredo Pasquarello
Positively charged defects induced by protons at the Si(100)-SiO2 interface are studied through density-functional calculations and realistic interface models. Protons generally preserve the bonding network, but cause the spontaneous breaking of strained bonds leading to threefold-coordinated Si(3)(+) and O(3)(+). Defect energies fall within a band of approximately 0.5 eV, which is stabilized by approximately 0.3 eV at the interface. Only the O(3)(+) at approximately 1 eV lower energies stand out as deep defects. This description is consistent with several experimental observations and supports the O(3)(+) as the origin of the fixed positive charge generated during silicon oxidation, in accord with a previous suggestion inferred from electrical data.
