ISAAC -- Integrated Silicon Automotive Accelerometer

ISAAC -- Integrated Silicon Automotive Accelerometer
复制标题

DOI:
10.1109/sensor.1995.717292
复制
发表时间:
1995-06
期刊:
Proceedings of the International Solid-State Sensors and Actuators Conference - TRANSDUCERS '95
影响因子:
--
通讯作者:
L. Spangler;C. J. Kemp
L. Spangler;C. J. Kemp
中科院分区:
其他
文献类型:
--
作者:
L. Spangler;C. J. Kemp

文献摘要

被引文献

相似文献

汽车被动约束系统的普及强调了提高系统可靠性、同时降低系统成本和尺寸的必要性。本文介绍了一种加速度计,该加速度计利用溶解晶圆工艺中的硅微机械加工和 CMOS ASIC 以及低成本塑料封装来支持下一代汽车被动约束系统的要求。
The pervasiveness of automotive passive restraint systems has emphasized the need for improving system reliability while simultaneously reducing the cost and size of the system. This paper describes an accelerometer that utilizes silicon micromachining in a dissolved wafer process and a CMOS ASIC along with low cost plastic packaging to support the requirements of the next generation of automotive passive restraint systems.