Effect of swirl flow on an atmospheric inductively coupled plasma supersonic jet

Effect of swirl flow on an atmospheric inductively coupled plasma supersonic jet
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DOI:
10.1016/j.vacuum.2006.01.033
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发表时间:
2006-09-07
期刊:
影响因子:
4
通讯作者:
Arakawa, Yoshihiro
Arakawa, Yoshihiro
中科院分区:
材料科学2区
文献类型:
--
作者:
Inoue, Takayoshi;Matsui, Makoto;Arakawa, Yoshihiro

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近年来,从大气电感耦合等离子体(ICP)中提取超声速射流引起了人们的广泛关注。为了稳定等离子体,大气ICP发生器通常采用旋流注入。然而,旋流注入对大气ICP发生器性能的影响尚不清楚。研究发现,旋流的注入使其性能恶化。首先采用声速流法进行了总焓测量,并计算了平均比焓。然后利用激光吸收光谱法测量了提取出来的超音速射流的温度和速度。两种测量结果均表明,射流的比焓随旋流率的增大而减小。这可能是因为漩涡流显著地影响了等离子体的形状和位置。(c) 2006 Elsevier Ltd.版权所有。
Recently supersonic jets extracted from atmospheric inductively coupled plasmas (ICP) have attracted a lot of attention. Usually atmospheric ICP generators have employed swirl flow injection in order to stabilize the plasma. However the effect of the swirl flow injection on the performance of atmospheric ICP generators has not been understood enough. This work found that the injection of the swirl flow deteriorates the performance. First we conducted the total enthalpy measurement based on the sonic flow method and evaluated the averaged specific enthalpy. Then laser absorption spectroscopy was employed in order to measure the temperature and the velocity of the extracted supersonic jet. The both measurements observed that the specific enthalpy of the jets decreased with the increase in the swirl flow fraction. This would be because the swirl flow affected the shape and the position of the plasma significantly. (c) 2006 Elsevier Ltd. All rights reserved.