A semiconducting metal oxide sensor array for the detection of NOx and NH3
A semiconducting metal oxide sensor array for the detection of NOx and NH3
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DOI：
10.1016/s0925-4005(01)00680-3
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发表时间：
2001-06-15
影响因子：
8.4
通讯作者：
Vetelino, JF
中科院分区：
文献类型：
--
作者：
Marquis, BT;Vetelino, JF
在许多化石燃料燃烧系统中，通过选择性催化还原（SCR）技术将氮氧化物排放降至最低，其中将NH3注入烟气流中与氮氧化物反应，形成对环境安全的气体，如氮气和水蒸气。不幸的是，这个过程通常是不完整的，导致NOx排放或过量的NH3 （NH3滑移）。因此，迫切需要在堆附近安装一个原位传感器阵列，以实时控制NH3的注入，从而最大限度地减少氮氧化物排放到环境中。在目前的工作中，半导体金属氧化物（SMO）薄膜技术被用于设计一个小的、坚固的、敏感的、选择性的传感器阵列来检测NOx和NH3的排放。为了确定两种能够灵敏和选择性地检测NOx和NH3的薄膜配方，对许多基于三氧化钨（WO3）薄膜的传感元件进行了测试。每种薄膜配方中固有的关键参数是衬底材料类型、薄膜厚度、掺杂、沉积温度和操作温度。分析了双元传感器阵列的响应特性，包括响应和恢复时间、反应速率、动态范围、灵敏度、重复性和选择性。(C) 2001年Elsevier Science B.V.出版
In many fossil fuel burning systems, NOx emissions are minimized by a selective catalytic reduction (SCR) technique where NH3 is injected into the flue gas stream to react with NOx to form environmentally safe gases, such as nitrogen and water vapor. Unfortunately this process is usually incomplete, resulting in either NOx emissions or excess NH3 (NH3 slip). Therefore, a critical need exits for an in situ sensor array near the stack to provide real-time control of the NH3 injection, and hence, minimize the NOx emissions released into the environment. In the present work, semiconducting metal oxide (SMO) film technology is used to engineer a small, robust, sensitive, and selective sensor array to detect NOx and NH3 emissions. Many thin film tungsten trioxide (WO3) based sensing elements were tested in order to identify two film recipes capable of sensitively and selectively detecting NOx and NH3. The critical parameters inherent in each film recipe are type of substrate material, film thickness, doping, deposition temperature, and operating temperature. The two element sensor array's response characteristics analyzed include the response and recovery times, rates of reaction, dynamic range, sensitivity, repeatability and selectivity. (C) 2001 Published by Elsevier Science B.V.