Development of a nail-deformation haptics device fabricated adopting ultra-thin PZT-MEMS technology
Development of a nail-deformation haptics device fabricated adopting ultra-thin PZT-MEMS technology
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采用超薄 PZT-MEMS 技术制造的指甲变形触觉装置的开发
DOI：
10.35848/1347-4065/ac82a3
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发表时间：
2022
影响因子：
1.5
通讯作者：
T. Kobayashi
中科院分区：
文献类型：
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作者：
T. Takeshita;D. Zymelka;Y. Takei;N. Makimoto;T. Kobayashi
我们描述了具有柔性触觉膜的指甲变形触觉执行器的制造和评估。所开发的致动器的新颖之处在于产生直接使指甲和指垫变形的振动。柔性压电MEMS薄膜采用超薄锆钛酸铅微机电系统（MEMS）和层压技术制造。柔性压电MEMS薄膜具有柔韧性（厚度：65μm）和轻重量（质量：55mg）。因此，该装置可以附接在指甲上而不会感到不适。通过将这种柔性压电 MEMS 薄膜附着在人造指甲上，制造了指甲变形触觉执行器。当对薄膜施加40V的直流电压时，钉子的圆柱方向上的应变为-36.5×10-6，圆周方向上的应变为-12.1×10-6。此外，以 200-300 Hz 的频率施加交流电压（40 V 峰峰值，20 V 偏移），指垫变形足以感知振动。
We describe the fabrication and evaluation of a nail-deformation haptics actuator having a flexible haptics film. The novelty of the developed actuator is the generation of a vibration that directly deforms the nail and finger pad. The flexible piezo-MEMS film is fabricated adopting ultra-thin lead-zirconate-titanate microelectromechanical system (MEMS) and lamination technology. The flexible piezo-MEMS film has flexibility (thickness: 65 μm) and low weight (mass: 55 mg). The device can thus be attached on a nail without discomfort. A nail-deformation haptics actuator was fabricated by attaching this flexible piezo-MEMS film on an artificial nail. When applying a DC voltage of 40 V to the film, there was a strain of −36.5 × 10−6 in the cylindrical direction of the nail and −12.1 × 10−6 in the circumferential direction. Furthermore, applying an AC voltage (40 V pp, 20 V offset) at a frequency of 200–300 Hz, the finger pad deformed sufficiently to perceive vibration.