A Suspended Membrane Nanocalorimeter for Ultralow Volume Bioanalysis
A Suspended Membrane Nanocalorimeter for Ultralow Volume Bioanalysis
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DOI：
10.1109/tnb.2002.806935
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发表时间：
2002-03-01
影响因子：
3.9
通讯作者：
Cooper, Jon M.
中科院分区：
文献类型：
--
作者：
Johannessen, Erik A.;Weaver, John M. R.;Cooper, Jon M.
采用各向异性湿法腐蚀、光刻和电子束光刻技术，采用体硅微机械加工技术制作了一种测量水介质中PL体积的纳米量热式悬膜传感器。通过将0.7nL体积的小型化反应容器集成在800 nm厚300×300mum(2)大尺寸氮化硅薄膜上，并与周围的体硅进行热绝缘，获得了125muK的高温灵敏度和12ms的快速未过滤时间常数。10结金和镍热电传感器与集成的超低噪声前置放大器相结合，使单次测量的功率分辨率达到15-NW，这一结果得到了电气校准的证实。高灵敏度和快速响应时间的结合是小型化的结果。选择金和镍作为传感器材料在易于制造和成本的情况下提供了最大的热敏感度。该纳米量热传感器具有以超低容量高密度阵列格式集成的潜力，用于表征其中存在热交换的过程。
A nanocalorimetric suspended membrane sensor for pL volumes of aqueous media was fabricated by bulk silicon micromachining using anisotropic wet etching and photo and electron beam lithographic techniques. A high-temperature sensitivity of 125 mu K and a rapid unfiltered time constant of 12 ms have been achieved by integrating a miniaturized reaction vessel of 0.7-nL volume on a 800-nm-thick and 300 x 300- mu m(2)-large silicon nitride membrane, thermally insulated from the surrounding bulk silicon. The combination of a ten-junction gold and nickel thermoelectric sensor with an integrated ultralow noise preamplifier has enabled the resolution of 15-nW power in a single measurement, a result confirmed by electrical calibration. The combination of a high sensitivity and rapid response time is a consequence of miniaturization. The choice of gold and nickel as sensor material provided the maximum thermal sensitivity in the context of ease of fabrication and cost. The nanocalorimetric sensor has the potential for integration in an ultralow-volume high-density array format for the characterization of processes in which there is an exchange of heat.