High Efficiency Operation of Membrane Distributed-Reflector Lasers on Silicon Substrate
High Efficiency Operation of Membrane Distributed-Reflector Lasers on Silicon Substrate
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硅衬底上膜分布反射器激光器的高效运行
DOI：
10.1109/jstqe.2017.2704289
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发表时间：
2017
影响因子：
4.9
通讯作者：
Shigehisa Arai
中科院分区：
文献类型：
--
作者：
Takuo Hiratani;Daisuke Inoue;Takahiro Tomiyasu;Kai Fukuda;Tomohiro Amemiya;Nobuhiko Nishiyama;Shigehisa Arai
为了提高片上光互连的性能，实现了具有低阈值电流和高效率单侧输出的薄膜分布反射（DR）激光器。首先，制作了有源区长度为80 μ m、DBR区长度为50 μ m的薄膜分布布拉格反射器（DBR）激光器。获得了35%的前端面输出的外微分量子效率，DBR反射率估计为75%。在此基础上，研制了具有61 μ m分布反馈段和50 μ m DBR段的薄膜DR激光器。阈值电流为0.48 mA，来自前侧波导的外部微分量子效率为26%，并且从前侧到后侧的光输出比为13。激光光谱显示出单模操作，边模抑制比（SMSR）为40 dB。最后，对30 μ m和61 μ m长的器件进行了小信号直接调制，获得了7.9GHz/mA 1/2和7 GHz/mA 1/2的调制电流效率因子。
To advance on-chip optical interconnections, membrane distributed-reflector (DR) lasers with low threshold current and high-efficiency operation at one side output were realized. First, a membrane distributed Bragg reflector (DBR) laser with 80-μm-long active section and 50-μm-long DBR section was fabricated to clarify the DBR reflectivity. An external differential quantum efficiency of 35% for the output from the front facet was obtained, and the DBR reflectivity was estimated to be 75%. Next, a membrane DR laser with 61- μm-long distributed feedback section and 50-μm-long DBR section was fabricated. A threshold current of 0.48 mA, external differential quantum efficiency from the front side waveguide of 26%, and light output ratio from the front to the rear sides of 13 were obtained. The lasing spectrum showed a single-mode operation with a side-mode suppression-ratio (SMSR) of 40 dB. Finally, small-signal direct modulation was carried out and a modulation current efficiency factor of 7.9 GHz/mA1/2and 7 GHz/mA1/2were, respectively, obtained for the 30-μm-long and 61-μm-long devices.