Electrostatic Force-induced Broadband Effect in Electret- based Vertical Vibration Energy Harvesters using Finegrained Stainless Steel Oscillator
Electrostatic Force-induced Broadband Effect in Electret- based Vertical Vibration Energy Harvesters using Finegrained Stainless Steel Oscillator
复制标题
使用细晶粒不锈钢振荡器的驻极体垂直振动能量收集器中的静电力引起的宽带效应
DOI：
10.1088/1742-6596/557/1/012124
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发表时间：
2014
期刊：
影响因子：
--
通讯作者：
H. Kuwano
中科院分区：
文献类型：
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作者：
H. Asanuma;M. Hara;H. Oguchi;H. Kuwano
我们提出了细晶不锈钢作为强健振荡器的理想材料，并研究了驻极体垂直振动能量收集器的带宽、共振频率和输出功率与初始气隙的关系。振荡器的光束具有小于10μm的浅侧刻蚀深度，边缘光滑。该振荡器成功地通过了1 mm的位移，没有断裂。此外，我们还发现，减小初始气隙可以获得更宽的频带和更低的谐振频率，而输出功率在最优的初始气隙处出现峰值。这可能归因于较强的静电力引起的软弹簧效应。在初始气隙为0.3 mm、加速度为4.9m/s2的条件下，收割机的最大输出功率密度为4.7kW/μ/cm~3，半高宽为14 Hz。
We propose a fine-grained stainless-steel as a promising material for a robust oscillator and investigate the dependence of frequency band width, resonance frequency, and output power on initial air gaps in electret-based vertical vibration energy harvesters. Beams of the oscillator showed a shallow side-etched depth less than 10 μm, as well as smooth edges. The oscillator succeeded in travelling over 1-mm displacement without fracture. Also, we found that broader frequency band, as well as lower resonance frequency, can be achieved with reducing the initial air gap, whereas the output power exhibited a peak value at an optimal initial air gap. The results may be attributed to the soft spring effect induced by the stronger electrostatic force. Maximum output power density and FWHM of frequency band width of our harvester are 4.7 μW/cm3 and 14 Hz at initial air gap 0.3 mm and acceleration 4.9 m/s2.