Photoelastic characterization of residual strain distribution in commerical off-axis SiC substrates
Photoelastic characterization of residual strain distribution in commerical off-axis SiC substrates
复制标题
商用离轴 SiC 衬底中残余应变分布的光弹性表征
DOI:
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发表时间:
2019
期刊:
影响因子:
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通讯作者:
福澤理行
中科院分区:
文献类型:
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作者:
Yutarou Iida;Desheng Fu,;福澤理行