Width-dependent interaction of trench-like microdischarges arranged in sub-arrays on a single silicon-based chip
Width-dependent interaction of trench-like microdischarges arranged in sub-arrays on a single silicon-based chip
复制标题
DOI：
10.1088/0963-0252/23/4/045012
复制
发表时间：
2014-06
影响因子：
3.8
通讯作者：
M. Kulsreshath;J. Golda;V. Schulz-von der Gathen;R. Dussart
中科院分区：
文献类型：
--
作者：
M. Kulsreshath;J. Golda;V. Schulz-von der Gathen;R. Dussart
为了克服基于生产的误差，研究了基于硅(Si)平台的多沟槽微放电反应器阵列。该器件在一块2 cm×2 cm的硅芯片上集成了四个沟槽式各向异性刻蚀腔子阵列。每个子阵列由相同数量的长度、深度和间隔相同的结构组成，只是沟槽宽度不同。实验在接近大气压的Ar中以10 kHz数量级的交流频率进行。通过电学测量和(相分辨)光发射对阵列进行了表征。结果表明，整个器件以及独立子阵列和单个腔体的行为与先前研究的倒金字塔结构相似。在相同的条件下，首次点火所需的电压随着空腔宽度的增加而增加。对于所有子阵列运行所需的最大电压，各个阵列在激励周期内以相反的顺序点燃。对于不同的激励频率，观察到了在子阵上独立传播的自脉冲和发射波。这两种现象都表现出不同的特征，单个子阵在较小的空腔中更加突出。这些观测在一幅简单的物理图景的框架内被解释为一个场和表面相关的过程，以及亚稳等长生命物种的影响。
Multiple trench microdischarge reactor arrays based on a silicon (Si) platform were investigated as a concept to overcome production-based errors. The devices incorporated four sub-arrays of trench-like anisotropically etched cavities on a single 2 cm × 2 cm Si chip. Each sub-array consisted of an equal number of structures of equal length, depth and separation only varying in trench width. Experiments were performed in argon (Ar) close to atmospheric pressure at ac frequencies of the order of 10 kHz. The arrays were characterized by means of electrical measurements and by (phase-resolved) optical emission. It is shown that the whole device as well as the independent sub-arrays and the individual cavities behave in a similar way as the inverted-pyramid structures investigated beforehand. Under identical conditions, the voltage required for a first ignition increases with the width of the cavities. For maximum voltages high enough for operation of all sub-arrays, the individual arrays ignite within the excitation period in reverse order. For different excitation frequencies, self-pulsing and emission waves propagating independently across the sub-arrays were observed. Both phenomena show distinct characteristics for the individual sub-arrays being more prominent for the smaller cavities. The observations are interpreted within the frame of a simple physical picture, as a field and a surface-dependent process and the influence of long-living species such as metastables.