Plasma processing of nanomaterials
Plasma processing of nanomaterials
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DOI：
10.1201/b11473
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
R. M. Sankaran
中科院分区：
文献类型：
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作者：
R. M. Sankaran
纳米级蚀刻和沉积，N。Marchack和J. P. Chang在下一代半导体加工中生产纳米特征的极紫外光光刻，J. Sporre和D.N.半导体纳米晶的低温等离子体合成。Kortshagen和L.用于金属和金属氧化物纳米颗粒合成的曼哥利尼微尺度等离子体。Mariotti和R. Mohan Sankaran大规模等离子体辅助纳米线生长。Cvelbar和M.K. Sunkara阴极弧放电合成碳纳米颗粒，M。Chhowalla和H.碳纳米管（CNT）的Emrah Unalan大气等离子体，J. Beom Park，S. J. Kyung和G.等离子体化学气相沉积法控制单壁碳纳米管的结构。Hatakeyama和T.通过等离子体增强化学气相沉积（PECVD）的加藤石墨烯生长，M. Meyyappan和J. - S.等离子体增强化学气相沉积碳基材料的模拟方面。Neyts，M.毛，M. Eckert，和A.一维纳米结构的催化生长模型。塔姆，K.奥斯特里科夫和T.尘埃等离子体中能量通量的墨菲诊断。Maurer和H.等离子体技术对碳纳米材料的选择性功能化和改性。Xu和L.等离子体-液体相互作用制造纳米生物材料，T。Kaneko和R Hatakeyama组装和纳米材料的自组织，A.E.莱德和K.奥斯特里科夫
Nanoscale Etching and Deposition, N. Marchack and J.P. Chang Extreme Ultraviolet Light Lithography for Producing Nanofeatures in Next-Generation Semiconductor Processing, J. Sporre and D.N. Ruzic Nonthermal Plasma Synthesis of Semiconductor Nanocrystals, U. Kortshagen and L. Mangolini Microscale Plasmas for Metal and Metal Oxide Nanoparticle Synthesis, D. Mariotti and R. Mohan Sankaran Large-Scale, Plasma-Assisted Growth of Nanowires, U. Cvelbar and M.K. Sunkara Cathodic Arc Discharge for Synthesis of Carbon Nanoparticles, M. Chhowalla and H. Emrah Unalan Atmospheric Plasmas for Carbon Nanotubes (CNTs), J. Beom Park, S.J. Kyung, and G. Young Yeom Structural Control of Single-Walled Carbon Nanotubes by Plasma Chemical Vapor Deposition, R. Hatakeyama and T. Kato Graphene Growth by Plasma-Enhanced Chemical Vapor Deposition (PECVD), M. Meyyappan and J.-S. Lee Modeling Aspects of Plasma-Enhanced Chemical Vapor Deposition of Carbon-Based Materials, E. Neyts, M. Mao, M. Eckert, and A. Bogaerts Modeling Catalytic Growth of One-Dimensional Nanostructures, E. Tam, K. Ostrikov, and T. Murphy Diagnostics of Energy Fluxes in Dusty Plasmas, H.R. Maurer and H. Kersten Selective Functionalization and Modification of Carbon Nanomaterials by Plasma Techniques, Y. Xu and L. Dai Plasma-Liquid Interactions for Fabrication of Nanobiomaterials, T. Kaneko and R Hatakeyama Assembly and Self-Organization of Nanomaterials, A.E. Rider and K. Ostrikov