High-Performance Liquid Alloy Patterning of Epidermal Strain Sensors for Local Fine Skin Movement Monitoring
High-Performance Liquid Alloy Patterning of Epidermal Strain Sensors for Local Fine Skin Movement Monitoring
复制标题
用于局部精细皮肤运动监测的表皮应变传感器的高性能液态合金图案化
DOI：
10.1089/soro.2018.0008
复制
发表时间：
2019-03-27
期刊：
影响因子：
7.9
通讯作者：
Wu, Zhigang
中科院分区：
文献类型：
--
作者：
Wang, Bei;Wu, Kang;Wu, Zhigang
如今，基于液态合金的可伸展/表皮电子学引起了越来越多的关注，各种加工技术随后被开发出来，展示了前所未有的各种应用。然而，为了充分发挥其潜在的优势，表皮电子学仍在寻找一种在分辨率、图案复杂性和操作灵活性方面都能满足要求的技术。在这项研究中，我们提出了一种允许在薄的可伸展衬底上形成复杂和高密度图案的技术，该技术结合了改进的水溶性掩模的紫外线激光图案化、在柔性临时衬底上雾化喷射沉积液态合金、通过水溶剥离以及最后的组件集成和封装。利用这项新技术，有可能制造出高密度液态合金图案的表皮精密应变传感器，能够监测局部皮肤的精细运动，如皱纹形成的详细过程以及身体部分的整体运动。此外，这一过程效率高、可控性好，有可能实现工业自动化和大规模生产。
Nowadays, stretchable/epidermal electronics based on liquid alloys has attracted more and more attention, and various processing techniques have subsequently been developed to demonstrate diverse applications never seen before. However, to fully exploit its potential advantages, epidermal electronics is still searching for a technique meeting all demands on resolution, pattern complexity, and operational flexibility. In this study, we propose a technique that allows for complex and high-density patterns on thin stretchable substrates by combining ultraviolet laser patterning of a modified water-soluble mask, atomized spray deposition of liquid alloys on a flexible temporary substrate, lift-off by water dissolving, and finally, component integration and encapsulation. With this new technique, it was possible to make epidermal precision strain sensors with liquid alloy patterns of high density, which were capable of monitoring fine local skin movements such as the detailed process of wrinkle formation as well as the overall motion of the body part. In addition, this process is highly efficient and well controllable, with high potential for possible industrial automation and massive production.