Single Crystal Diamond Micromechanical and Nanomechanical Resonators
Single Crystal Diamond Micromechanical and Nanomechanical Resonators
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DOI：
10.1007/978-3-030-12469-4_4
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发表时间：
2019
影响因子：
--
通讯作者：
M. Liao;Y. Koide;L. Sang
中科院分区：
文献类型：
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作者：
M. Liao;Y. Koide;L. Sang
微纳机电系统（MEMS/NEMS）在过去的几十年里经历了爆炸性的增长，其应用范围从汽车、消费者、工业、军事到生物技术。目前，由于CMOS工艺的成熟，MEMS以Si材料为主。然而，硅固有的弱点，如机械性能、摩擦学性能和热稳定性差，限制了器件的性能，阻碍了硅MEMS在恶劣环境中的应用。金刚石是恶劣环境下MEMS/NEMS的优秀材料，具有多种性能，比Si更好，具有金刚石的高杨氏模量、高热导率、疏水性表面和可定制的电子结构等优异性能。在本章中，我们回顾了我们最近在单晶金刚石（SCD）机械谐振器的批量制造的进展。讨论了SCD机械谐振器的能量损失机理，并提出了改善谐振器品质因数的策略。
Micro- or nanoelectromechanical system (MEMS/NEMS) has witnessed explosive growth with applications spanning from automotive, consumer, industry, military, to biotechnology in the past decades. Presently, MEMS are dominated by Si material due to the mature CMOS technology. However, the intrinsic weakness of Si such as poor mechanical or tribological properties and poor thermal stability limit the device performance and hinder the applications of Si MEMS in harsh environments. Diamond is an outstanding material for MEMS/NEMS under harsh environments with diverse and much better performance than Si in terms of the excellent properties such as high Young’s modulus, high thermal conductivity, hydrophobic surface, and tailorable electronic configuration of diamond. In this chapter, we review our recent progress in the batch fabrication of single crystal diamond (SCD) mechanical resonators on SCD. The energy loss mechanism in the SCD mechanical resonators were discussed and the strategies to improve quality factors of the SCD resonators were described.