A Compact Variable-Temperature Broadband Series-Resistor Calibration
A Compact Variable-Temperature Broadband Series-Resistor Calibration
复制标题
紧凑型变温宽带串联电阻校准
DOI：
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发表时间：
2011
影响因子：
4.3
通讯作者：
J. Booth
中科院分区：
文献类型：
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作者：
N. Orloff;J. Mateu;A. Lewandowski;E. Rocas;J. King;D. Gu;X. Lu;C. Collado;I. Takeuchi;J. Booth
我们提出了一个宽带晶圆校准从45 MHz到40 GHz的可变温度测量，这需要三个标准：一个通过，反射，串联电阻。在室温下，这种技术的最大误差，相比基准九标准多线穿透反射线（TRL）的方法，是可比的基准校准的重复性。串联电阻标准被建模为一个集总元件网络，这是由四个频率无关的参数。我们表明，该模型是稳定的超过三个星期，并比较校准的多线TRL方法作为时间的函数。然后，该方法被证明在可变的温度下，在300 K和可变的温度下，以确定其温度依赖性的模型参数被提取。由此产生的技术，有效的温度范围从300至20 K，减少了总足迹的校准标准的一个因素的17和测量时间的一个因素的3。
We present a broadband on-wafer calibration from 45 MHz to 40 GHz for variable temperature measurements, which requires three standards: a thru, reflect, and series resistor. At room temperature, the maximum error of this technique, compared to a benchmark nine-standard multiline thru-reflect-line (TRL) method, is comparable to the repeatability of the benchmark calibration. The series-resistor standard is modeled as a lumped-element -network, which is described by four frequency-independent parameters. We show that the model is stable over three weeks, and compare the calibration to the multiline TRL method as a function of time. The approach is then demonstrated at variable temperature, where the model parameters are extracted at 300 K and at variable temperatures down to 20 K, in order to determine their temperature dependence. The resulting technique, valid over the temperature range from 300 to 20 K, reduced the total footprint of the calibration standards by a factor of 17 and the measurement time by a factor of 3.