Intrinsic origin of electron scattering at the 4H-SiC(0001)/SiO2 interface
Intrinsic origin of electron scattering at the 4H-SiC(0001)/SiO2 interface
复制标题
4H-SiC(0001)/SiO2 界面电子散射的本质起源
DOI:
10.1103/physrevb.95.041302
复制
发表时间:
2017
期刊:
影响因子:
--
通讯作者:
T. Ono
中科院分区:
文献类型:
--
作者:
S. Iwase;C. J. Kirkham;T. Ono
We introduce a first-principles study to clarify the carrier-scattering property at the. Interestingly, the electron transport at the conduction-band edge is significantly affected by the introduction of oxygen, even though there are no electrically active defects. The origin of the large scattering is explained by the behavior of the internal-space states (ISSs). Moreover, the effect of the ISSs is larger than that of the electrically active carbon-related defects. This result indicates that an additional scattering not considered in a conventionaloccurs at the.