Comparison of TiN-coated tools using CVD and PVD processes during continuous cutting of Ni-based superalloys
Comparison of TiN-coated tools using CVD and PVD processes during continuous cutting of Ni-based superalloys
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DOI：
10.1016/j.surfcoat.2015.10.071
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发表时间：
2015-12-15
影响因子：
5.4
通讯作者：
Usuki, Hiroshi
中科院分区：
文献类型：
--
作者：
Koseki, Shuho;Inoue, Kenichi;Usuki, Hiroshi
高强度、低导电的镍基高温合金在加工过程中需要比其他材料更高的切削力和切削温度。了解涂层特性如缺陷形成和物理机械性能如何影响切削性能。采用物理气相沉积（PVD）法（电弧离子镀、溅射和空心阴极）和化学气相沉积（CVD）法制备了TiN涂层。溅射和CVD产生的TiN涂层比其他方法具有更少的缺陷。随后，在连续车削条件下，研究了718合金切削过程中TiN涂层的损伤。通过溅射和CVD涂覆的工具表现出微磨粒磨损，而没有严重的断裂或涂层的定界。此外，CVD涂层显示出最好的切削性能和较低的塑性变形比PVD涂层。TiN涂层的特征在于通过X射线衍射，纳米压痕，电子背散射衍射，和透射电子显微镜。由于在热处理之前和之后测量了涂层的硬度，因此CVD涂层比PVD涂层更耐由于加热引起的软化。PVD涂层的硬度降低归因于PVD涂层中的应变释放、原子重排和晶粒生长。这种具有良好高温稳定性和低缺陷密度的高强度涂层在镍基高温合金的加工过程中为切削刀具提供了强有力的保护。根据本研究结果，微细结构的CVD沉积涂层可能是镍基高温合金切削的良好候选涂层。(C)2015爱思唯尔B.V.保留所有权利。
High-strength, low-conducting Ni-based superalloys require higher cutting force and cutting temperature than other materials during the machining process. To understand how the coating characteristics such as defects formation and physical and mechanical properties affect cutting performance. TiN coatings were deposited by three physical vapor deposition (PVD) methods (arc ion plating, sputtering, and hollow cathode) and chemical vapor deposition (CVD). Sputtering and CVD yielded TiN coatings with fewer defects than other methods. Subsequently, the damage to the TiN coatings during machining of alloy 718 was investigated under continuous turning. Tools coated by sputtering and CVD exhibited micro-abrasion wear without heavy fracture or delimitation of the coating. Furthermore, the CVD coating showed the best cutting performance and lower plastic deformation than the PVD coatings. TiN coatings were characterized by X-ray diffraction, nanoindentation, electron back-scatter diffraction, and transmission electron microscopy. As the hardness of the coatings was measured before and after heat treatment, the CVD coating was more resistant to softening due to heating than the PVD coatings. The reduced hardness of the PVD coatings was attributed to strain release, atomic rearrangement, and grain growth in the PVD coatings. Such high-strength coatings with good high-temperature stability and low-defect density offer strong protection to cutting tools during machining of Ni-based superalloys. Based on the results of this study, fine structure CVD-deposited coatings may be good candidate coating for cutting of the Ni-based superalloys. (C) 2015 Elsevier B.V. All rights reserved.