A Micromachined Millimeter Wave Phase Shifter Using Semi-Lumped Elements
A Micromachined Millimeter Wave Phase Shifter Using Semi-Lumped Elements
复制标题
使用半集总元件的微机械毫米波移相器
DOI：
10.1007/978-3-642-59497-7_360
复制
发表时间：
2001
期刊：
影响因子：
--
通讯作者：
Yong
中科院分区：
文献类型：
--
作者：
Jaehyoung Park;H. Kim;Kyungteh Kang;Y. Kwon;Yong
介绍了一种采用半集总元件传输结构的表面微机械毫米波移相器，该移相器具有体积小、单线损耗大的特点。这种多极移相器可以通过级联单元来简单地制作。移相器的单元单元由高阻中心信号线和桥式可变电容组成。可变电容器悬挂在连接到信号线两侧的平板上2微米，以减少单位单元长度，从而导致每条线路长度的高相移。实际测量的可变电容吸合电压为50V。在直流偏置为45V的情况下，该移相器在50 GHz处具有高的每损耗相移(76.2°/分贝)和高的每线长相移(25.3°/mm)。
This paper demonstrates a surface micromachined millimeter wave phase shifter with small size and large phase shift per line loss using semi-lumped elements transmission structure. The multi-pole phase shifter can be easily fabricated by cascading the unit cell. The unit cell of the phase shifter is composed of the high impedance center signal line and bridge type variable capacitors. The variable capacitors are suspended 2µm over the plate connected to the both sides of the signal line to reduce the unit cell length, resulting in high phase shift per line length. The measured pull-in voltage of the variable capacitor is 50 V. The fabricated phase shifter shows high phase shift per loss (76.2 °/dB) as well as the high phase shift per line length (25.3 °/mm) at 50 GHz with the applied DC bias of 45 V.