Physical mechanism of refractive index inhomogeneity of hafnium oxidethin film prepared by ion beam sputtering technique
Physical mechanism of refractive index inhomogeneity of hafnium oxidethin film prepared by ion beam sputtering technique
复制标题
离子束溅射技术制备氧化铪薄膜折射率不均匀性的物理机制
作者：
Huasong Liu;Lishuan Wang;Yugang Jiang;Xiao Yang;Shida Li;D;an Liu;Yiqin Ji;Feng Zhang;Deying Chen
