High-Sensitivity Silicon Cantilever-Enhanced Photoacoustic Spectroscopy Analyzer with Low Gas Consumption
High-Sensitivity Silicon Cantilever-Enhanced Photoacoustic Spectroscopy Analyzer with Low Gas Consumption
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DOI：
10.1021/acs.analchem.1c04309
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发表时间：
2022-01-06
影响因子：
7.4
通讯作者：
Yu, Qingxu
中科院分区：
文献类型：
--
作者：
Guo, Min;Chen, Ke;Yu, Qingxu
提出了一种基于硅悬臂梁增强光声光谱（PAS）的低气体消耗微量气体分析仪。设计了一种结构紧凑、灵敏度高的硅基光纤法布里-珀罗（F-P）干涉型光声传感器。非共振光声池（PAC）是一个体积为0.56 mL的圆柱形铜管。使用使用掺铒光纤应用放大器放大的中心波长为1532.83 nm的近红外激光作为激发光。采用波长调制光谱技术对二次谐波光声信号进行检测。实验结果表明，在平均时间为60 s的条件下，C2 H2的最低检测限为199.8ppt。归一化噪声等效吸收系数计算为1.72 x 10（-9）cm（-1）W/Hz（1/2）。此外，所提出的硅纳米管增强的非共振PAS基气体分析仪不仅可以分析气体浓度在一个封闭的小容量PAC与低气体消耗，但也检测目标气体泄漏在真实的时间在很长的距离。
A silicon cantilever-enhanced photoacoustic spectroscopy (PAS)based trace gas analyzer with low gas consumption is presented. A silicon cantilever-based fiber-optic Fabry-Perot (F-P) interferometric acoustic sensor with a compact structure and high sensitivity is designed for photoacoustic signal detection. The non-resonant photoacoustic cell (PAC) is a cylindrical copper tube with a volume of 0.56 mL. A near-infrared laser with a center wavelength of 1532.83 nm amplified using an erbium-doped fiber application amplifier is used as the excitation light. The wavelength modulation spectroscopy (WMS) technique is employed in the present work for second-harmonic photoacoustic signal detection. The experimental results show that the minimum detection limit of C2H2 is 199.8 parts per trillion (ppt) with an average time of 60 s. The normalized noise equivalent absorption coefficient is calculated as 1.72 x 10(-9) cm(-1) W/Hz(1/2). Furthermore, the proposed silicon cantilever-enhanced non-resonant PAS-based gas analyzer can not only analyze the gas concentration in a closed small-capacity PAC with low gas consumption but also detect target gas leakage in real time at a long distance.