Observational and theoretical validation of longitudinal type surface acoustic wave devices
Observational and theoretical validation of longitudinal type surface acoustic wave devices
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DOI：
10.7567/1347-4065/ab0ad5
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发表时间：
2019-06
影响因子：
1.5
通讯作者：
Tetsuya Kimura;Haruki Kyoya;H. Okunaga;Masashi Omura;K. Hashimoto
中科院分区：
文献类型：
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作者：
Tetsuya Kimura;Haruki Kyoya;H. Okunaga;Masashi Omura;K. Hashimoto
作者提出了一种由铌酸锂薄板、声镜、手柄衬底和叉指换能器组成的纵向型声表面波器件。本文介绍了所提出的设备，通过使用激光探针系统和有限元分析（FEA）的观察和理论验证。通过观察声反射镜存在和不存在时的声表面波场分布、与有限元分析结果的比较以及横模模式的变化，表明基于Sagnac干涉仪的激光探针系统可以有效地直接观察工作在甚至2 GHz范围内的器件。此外，还从理论和实验上发现了叉指换能器的声表面波辐射与母线垂直的现象，并对这种现象的可能辐射机理进行了讨论。
The authors have proposed longitudinal type surface acoustic wave (SAW) devices comprising a LiNbO3 thin plate, acoustic mirror, handle substrate and interdigital transducers (IDT). This paper describes the observational and theoretical validation of the proposed devices by using a laser probe system and finite element analysis (FEA). It is shown that the laser probe system based on the Sagnac interferometer is effective for direct observation of the devices operated at even 2 GHz range through the observation of SAW field distribution of the existence and lack of acoustic mirror, their comparison with FEA results and changes of the transverse mode pattern. In addition, a phenomenon of SAW radiation normal to the busbars from IDT is found both observationally and theoretically, and a possible radiation mechanism explaining the results is also discussed.