Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators
Dynamics Of Polysilicon Parallel-plate Electrostatic Actuators
复制标题
多晶硅平行板静电致动器的动力学
DOI：
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发表时间：
1995
期刊：
影响因子：
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通讯作者：
K. Pister
中科院分区：
文献类型：
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作者：
P. Chu;P. Nelson;M. Tachiki;K. Pister
研究了多晶硅平行板静电驱动器对交流电压的响应。用激光干涉仪测量了不同偏置电压下的信号。利用微铰链，将大平板（面积从100“am2到= 0.1mm2）与长而薄的支撑梁（如600 μ m × 3，μ m × 1.5，μ m）旋转离开基板表面，形成平行板电容器。具有100 μ m间隙的制造结构可以用低至50 V的电压静电闭合。这种新的致动器估计输出高达50“aN的力。除了谐振Q值，实验结果是在一个简单的非线性模型的基础上的致动器与模拟吻合良好。
The response of a polysilicon parallel-plate electrostatic actuator to a.c. signals at different bias voltages has been measured with a laser interferometer. Using microhinges, large plates (with areas from 100 "am 2 to = 0.1 mm 2) with long thin support beams (such as 600 ~m X 3 ,am × 1.5 ,am) are rotated off the surface of the substrate to form a parallel-plate capacitor. Fabricated structures having 100 #m gaps can be closed electrostatically with voltages as low as 50 V. This new actuator is estimated to output a force of up to 50 "aN. With the exception of the resonant Q-value, the experimental results are in good agreement with simulations based on a simple nonlinear model for the actuator.