Thermoelastic damping in GaAs micromechanical resonators
Thermoelastic damping in GaAs micromechanical resonators
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DOI：
10.1002/pssc.200779224
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发表时间：
2008-07
期刊：
影响因子：
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通讯作者：
H. Okamoto;D. Ito;K. Onomitsu;H. Yamaguchi
中科院分区：
文献类型：
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作者：
H. Okamoto;D. Ito;K. Onomitsu;H. Yamaguchi
机械运动的阻尼是限制机械谐振器灵敏度的因素之一。对于高灵敏度换能器的开发，了解谐振器的阻尼机制并最大限度地减少阻尼效应非常重要。在这里，我们发现 GaAs 微悬臂梁的阻尼强烈依赖于温度，并且在 50 K 左右最小。阻尼的这种温度依赖性主要是由热弹性阻尼效应引起的，该效应是由 GaAs 悬臂梁中应变引起的温度梯度产生的。 50 K 左右的机械阻尼最小化是由于在该温度下抑制了 GaAs 的热膨胀，从而消除了悬臂梁中的温度梯度。这一结果表明，GaAs 谐振器的灵敏度可以通过调整工作温度来提高。 （© 2008 WILEY-VCH Verlag GmbH & Co. KGaA，魏因海姆）
Damping of the mechanical motion is one of the factors that limit the sensitivity of mechanical resonators. For the development of high-sensitivity transducers, it is important to understand the damping mechanism of the resonators and minimize the damping effect. Here, we show that the damping of a GaAs microcantilever strongly depends on the temperature and it is minimized at around 50 K. This temperature dependence of the damping is mainly caused by the thermoelastic damping effect, which is generated by the strain-induced temperature gradient in the GaAs cantilever. The minimization of the mechanical damping at around 50 K is due to the suppression of the thermal expansion of GaAs at this temperature, which eliminates the temperature gradient in the cantilever. This result indicates that the sensitivity of GaAs resonators can be improved by adjusting the operating temperature. (© 2008 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)