Preparation of Micro Gripper Pincer End with Bionic Superhydrophobic Surface and Analysis of Gripping Performance
Preparation of Micro Gripper Pincer End with Bionic Superhydrophobic Surface and Analysis of Gripping Performance
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DOI：
10.1109/3m-nano58613.2023.10305333
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发表时间：
2023-07
期刊：
影响因子：
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通讯作者：
Meng Wang;Xue Yang;Na Ni;Jing Ye;Zhen Yang;Yanling Tian
中科院分区：
文献类型：
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作者：
Meng Wang;Xue Yang;Na Ni;Jing Ye;Zhen Yang;Yanling Tian
近年来，微夹持器已广泛应用于微/纳米制造工业中。然而，在它们的应用过程中，微夹钳的端面容易吸附杂质，使得在抓取过程中很难释放小物体，从而影响了它们的加工效率。为了克服这些缺点，提高微夹钳的性能，本研究利用激光烧蚀微/纳复合结构结合氟硅烷化学改性，在微夹钳末端快速制备具有特殊润湿性能的超疏水表面，钳体处的水接触角（WCAs）达到156. 2 ± 2.0°，滚动角（RA）达到2. 2 ± 0.6°。这种类型的微夹持器的表面有效地抑制了夹持端处的杂质吸附，并增强了夹持器对微粒的释放性能。此外，通过三维表面形貌和表面化学成分分析，系统研究了微夹持器夹持端超疏水表面的形成机理，为夹持器夹持端超疏水功能表面的快速制备奠定了基础。
In recent years, micro grippers have been widely used in the micro/nanomanufacturing industry. However, during their application, the end face of the micro gripper pincer tends to adsorb impurities, making it difficult to release small objects during the gripping process, which affects their processing efficiency. To overcome these drawbacks and improve the performance of micro grippers, this study utilizes laser ablation micro/nano composite structures combined with fluorosilane chemical modification to rapidly prepare superhydrophobic surfaces with special wetting properties at the end of the micro gripper pincer, and the water contact angle (WCAs) at the pincer body reaches 156. 2 ± 2.0°, and the rolling angle (RAs) reaches 2. 2 ± 0.6°. The surface of this type of micro gripper effectively suppresses the adsorption of impurities at the gripping end and enhances the release performance of the gripper for microparticles. Additionally, this study systematically investigates the formation mechanism of the superhydrophobic surface on the pincer end of micro gripper by the analysis of three-dimensional surface topography and surface chemical composition, providing a foundation for the rapid preparation of superhydrophobic functional surfaces on gripper ends.