High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG
High temperature micro-glassblowing process demonstrated on fused quartz and ULE TSG
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DOI：
10.1016/j.sna.2012.11.040
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发表时间：
2013-10-01
影响因子：
4.6
通讯作者：
Shkel, A. M.
中科院分区：
文献类型：
--
作者：
Senkal, D.;Ahamed, M. J.;Shkel, A. M.
我们报告，第一次，MEMS制造过程中，原子光滑，对称的3-D酒杯和球壳结构，使用低内部损耗材料，即熔融石英和超低膨胀二氧化钛硅酸盐玻璃（ULE TSG）。该方法由三个主要步骤组成：（1）深熔凝石英腔蚀刻，（2）熔凝石英与熔凝石英或TSG的等离子体活化结合，以及（3）高温（高达1700摄氏度）微玻璃吹制工艺。开发了1800摄氏度玻璃吹制的内部工艺能力，快速冷却速率为500摄氏度/分钟。该工艺的可行性已通过熔凝石英和TSG微玻璃吹制结构的制造得到证明。利用该工艺制备了具有自对准杆结构的球形和倒置酒杯形壳体。该方法可以实现具有极低表面粗糙度（0.23 nm表面平均值）、固有低热弹性耗散（Q（TED）> 5E+10）和高度对称结构（径向误差< 500 ppm）的新型TSG和熔融石英MEMS器件。(C)2012爱思唯尔有限公司版权所有。
We report, for the first time, a MEMS fabrication process for building atomically smooth, symmetric 3-D wineglass and spherical shell structures, using low internal loss materials, namely fused quartz and ultra low expansion titania silicate glass (ULE TSG). The approach consists of three major steps: (1) a deep fused quartz cavity etch, (2) plasma activated bonding of fused quartz to fused quartz or TSG and (3) a high temperature (up to 1700 degrees C) micro-glassblowing process. An in-house process capability of 1800 degrees C glassblowing with a rapid cooling rate of 500 degrees C/min was developed. Feasibility of the process has been demonstrated by fabrication of fused quartz and TSG micro-glassblown structures. Spherical and inverted-wineglass shells with self-aligned stem structures were fabricated using this process. The approach may enable new classes of TSG and fused quartz MEMS devices with extremely low surface roughness (0.23 nm surface average), intrinsically low thermoelastic dissipation (Q(TED) > 5E+10), and highly symmetric structures (radial error < 500 ppm). (C) 2012 Elsevier B.V. All rights reserved.