Takeshi Goto: "An experimental investigation of sensitivity dependence with respect to waveguide position micromachined diaphragm in a silicon-based integrated optic pressure sensor"Proceedings of SPIE. 4591. 337-344 (2001)
Takeshi Goto: "An experimental investigation of sensitivity dependence with respect to waveguide position micromachined diaphragm in a silicon-based integrated optic pressure sensor"Proceedings of SPIE. 4591. 337-344 (2001)
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Takeshi Goto:“硅基集成光学压力传感器中波导位置微机械隔膜灵敏度依赖性的实验研究”SPIE 论文集。
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