K. Mizoguchi; S. Nakashima; A. Fujii; A. Mitsuishi; H. Morimoto; H. Onodera; T. Kato: ""Characterization of Silicon Implanted with Focused Ion Beam by Raman Microprobe"" Jpn. J. Appl. Phys.903 (1987)
K. Mizoguchi; S. Nakashima; A. Fujii; A. Mitsuishi; H. Morimoto; H. Onodera; T. Kato: ""Characterization of Silicon Implanted with Focused Ion Beam by Raman Microprobe"" Jpn. J. Appl. Phys.903 (1987)
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