Super-Resolution Electrochemical Impedance Imaging With a 512 x 256 CMOS Sensor Array
Super-Resolution Electrochemical Impedance Imaging With a 512 x 256 CMOS Sensor Array
复制标题
DOI：
10.1109/tbcas.2022.3183856
复制
发表时间：
2022-08-01
影响因子：
5.1
通讯作者：
Rosenstein, Jacob K.
中科院分区：
文献类型：
--
作者：
Hu, Kangping;Ho, Jason;Rosenstein, Jacob K.
超分辨率成像是将多个低分辨率图像合并成一个高分辨率图像的一系列技术。虽然超分辨率通常应用于光学系统，但它也可以与其他成像方式一起使用。在这里，我们展示了用于微尺度超分辨率电化学阻抗谱（SR-EIS）成像的512 x 256 CMOS传感器阵列。该系统采用标准的180纳米CMOS技术，像素尺寸为10 μ m × 10 μ m。该传感器阵列用于测量可编程像素对之间的互电容。然后可以通过计算组合多个空间分辨阻抗图像来生成超分辨阻抗图像。我们使用有限元静电模拟来支持所提出的测量方法，并讨论了超分辨率图像重建的简单算法。我们提出了单个绿藻细胞内亚细胞介电常数分布的实验测量，显示了传感器产生亚像素分辨率微尺度阻抗图像的能力。
Super-resolution imaging is a family of techniques in which multiple lower-resolution images can be merged to produce a single image at higher resolution. While super-resolution is often applied to optical systems, it can also be used with other imaging modalities. Here we demonstrate a 512 x 256 CMOS sensor array for micro-scale super-resolution electrochemical impedance spectroscopy (SR-EIS) imaging. The system is implemented in standard 180 nm CMOS technology with a 10 mu m x 10 mu m pixel size. The sensor array is designed to measure the mutual capacitance between programmable sets of pixel pairs. Multiple spatially-resolved impedance images can then be computationally combined to generate a super-resolution impedance image. We use finite-element electrostatic simulations to support the proposed measurement approach and discuss straightforward algorithms for super-resolution image reconstruction. We present experimental measurements of sub-cellular permittivity distribution within single green algae cells, showing the sensor's capability to produce microscale impedance images with sub-pixel resolution.