Fabrication of Pt/Sr_2(Ta_<1-x>, Nb_x)_2O_7/IrO_2/SiO_2/Si Device with Large Memory Window and Metal- Ferroelectric- Metal-Insulator-Si Field-Effect Transistor

Fabrication of Pt/Sr_2(Ta_<1-x>, Nb_x)_2O_7/IrO_2/SiO_2/Si Device with Large Memory Window and Metal- Ferroelectric- Metal-Insulator-Si Field-Effect Transistor
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大存储窗Pt/Sr_2(Ta_<1-x>,Nb_x)_2O_7/IrO_2/SiO_2/Si器件及金属-铁电-金属-绝缘体-硅场效应晶体管的制作

DOI:
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发表时间:
2006
期刊:
Japanese journal of Applied Physics Vol. 45, No. 9B
影响因子:
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通讯作者:
et al.
et al.
中科院分区:
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文献类型:
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作者:
Ichirou Takahashi;Tadahiro Ohmi;et al.

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