A New 1 MHz-9 GHz Thin-Film Permeameter Using a Side-Open TEM Cell and a Planar Shielded-Loop Coil
A New 1 MHz-9 GHz Thin-Film Permeameter Using a Side-Open TEM Cell and a Planar Shielded-Loop Coil
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使用侧开 TEM 室和平面屏蔽环路线圈的新型 1 MHz-9 GHz 薄膜磁导计
DOI：
10.3379/tmjpn2001.3.137
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发表时间：
2003
期刊：
影响因子：
--
通讯作者：
K. Arai
中科院分区：
文献类型：
--
作者：
M. Yamaguchi;Y. Miyazawa;K. Kaminishi;K. Arai
提出了一种新的金属和绝缘薄膜的磁导率高达9 GHz的范围。薄膜样品由行波电磁场驱动，输出信号由平面屏蔽环线圈检测。在拾取线圈的电场感应电压可以很好地抑制由平面屏蔽环线圈的性质。对非晶CoNbZr薄膜和颗粒状CoZrO薄膜进行了测量。
A new permeameter for both metallic and insulative thin-films is proposed for up to 9 GHz range. The film sample is driven by a traveling electromagnetic field and the output signal is sensed by a planar shielded-loop coil. The electric field induced voltage at the pickup coil can well be suppressed by the nature of the planar shielded-loop coil. Measurements on an amorphous CoNbZr thin film and a granular CoZrO thin film were demonstrated.