Measuring Step Heights Using An Optical Profiler
Measuring Step Heights Using An Optical Profiler
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使用光学轮廓仪测量台阶高度
DOI：
10.1117/12.938629
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发表时间：
1986
期刊：
影响因子：
--
通讯作者：
K. Creath
中科院分区：
文献类型：
--
作者：
K. Creath
将双波长相移干涉法应用于干涉相位测量显微镜，实现了台阶高度的测量。在合成的等效波长λeq = λaλB/|λa - λB|使用在波长λa和λB处进行的测量。在等效波长处，该技术的均方根重复率为λ/1000。为了提高数据的精度，使用等效波长结果来确定条纹阶数，以去除单波长数据中的相位模糊度。当进行此校正时，可获得104的测量动态范围（特征高度/rms重复性）。该技术可以使用10倍物镜测量高达10 μm的高度。
Two-wavelength phase-shifting interferometry is applied to an interference phase-measuring microscope enabling the measurement of step heights. The surface is effectively tested at a synthesized equivalent wavelength λeq = λaλb/|λa - λb| using measurements made at wavelengths λa and λb. The rms repeatabilty of the technique is λ/1000 at the equivalent wavelength. To improve the precision of the data, the phase ambiguities in the single wavelength data are removed using the equivalent wavelength results to determine fringe orders. When this correction is made, a measurement dynamic range (feature height/rms repeatability) of 104 is obtainable. This technique enables features of up to 10 μm in height to be measured with a 10x objective.