A Micro Conveyance Actuator based on Superconducting Magnetic Levitation
A Micro Conveyance Actuator based on Superconducting Magnetic Levitation
复制标题
一种基于超导磁悬浮的微输送执行器
DOI：
10.1541/ieejsmas.119.417
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发表时间：
1999
影响因子：
--
通讯作者：
Fujita Hiroyuki
中科院分区：
文献类型：
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作者：
Iizuka Tetsuhiko;Fujita Hiroyuki
报道了一种基于超导磁悬浮的微输送执行器的设计及其驱动特性。该驱动器由三部分组成：超导体（Y-Ba-Cu-O），由聚酰亚胺薄膜上的图案化铜电极制成的定子层和具有四个永磁体（一个磁体的尺寸为1 mm立方体）的滑块。该输送致动器不会产生颗粒，因为通过磁悬浮在移动部件和固定部件之间不存在接触。滑块的位置由图案化电极中的电流控制。本文讨论了微步驱动的直线运动和旋转运动的驱动特性。采用全区域步进驱动和目标位置附近局部区域微步驱动相结合的方法，实现了在2.8mm范围内280μm/s的快速输送和40μm的精确定位。
The design and the driving characteristics of a micro conveyance actuator based on superconducting magnetic levitation are reported. This actuator consists of three parts; a superconductor (Y-Ba-Cu-O), a stator layer made by patterned copper electrodes on the poly-imide film and a slider with four permanent magnets (the size of one magnet is 1mm cube). This conveyance actuator is free from particle generation, because there is no contact between moving and stationary parts by the magnetic levitation. The position of the slider is controlled by the current in patterned electrodes. In this paper, we discuss the driving characteristics of the linear and rotary motion by using the micro-step actuation. We have obtained the quick conveyance with the speed of 280μm/s in the range of 2.8mm and the precise positioning with the accuracy of 40μm by combining the step actuation in the entire area and the micro-step actuation in the local area near the target position.