New SNOM sensor using optical feedback in a VCSEL-based compound-cavity
New SNOM sensor using optical feedback in a VCSEL-based compound-cavity
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DOI：
10.1016/s0924-4247(00)00478-7
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发表时间：
2001-01
影响因子：
4.6
通讯作者：
C. Gorecki;S. Khalfallah;H. Kawakatsu;Y. Arakawa
中科院分区：
文献类型：
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作者：
C. Gorecki;S. Khalfallah;H. Kawakatsu;Y. Arakawa
今天，大多数近场纳米探测器都是由经过特殊处理的光纤组成的，这些光纤很难制造出重复性高、数量大的光纤。为了克服这一障碍，我们提出了一种小型化的近场传感器。其中一个创新之处是利用垂直腔面发射激光器(VCSEL)腔的光反馈特性作为主动探测原理。另一个新奇之处是，具有GaAs微机械针尖的复合腔VCSEL的结构提供了纳米级的近场探测器分辨率，是首次尝试将SNOM显微镜微型化。首先，我们研究了外光反馈对垂直腔面发射激光器阈值和光谱特性的影响。其次，理论分析和实验证明了VCSEL反馈作为SNOM显微镜检测原理的可行性。最后，我们提出了一种在VCSEL上集成微尖的SNOM传感器的紧凑结构，并报告了集成器件的初步制作结果。
Today, most near-field nanoprobes consist of specially processed optical fibres, which are difficult to fabricate with high reproducibility and in large number. To overcome this handicap, we propose a miniaturised near-field sensor. One of the novelties is to use the optical feedback properties of a vertical-cavity surface-emitting laser (VCSEL) cavity as an active principle of detection. The other novelty is that the architecture of a compound-cavity VCSEL with a GaAs micromachined tip, offering a nanometer-scale resolution of near-field probes, constitutes the first tentative to miniaturise an SNOM microscope. First, we investigate the effects of external optical feedback on the threshold and spectral characteristics of VCSELs. Second, theoretical analysis and experimental evidence demonstrate the practicability of VCSEL feedback as a detection principle for SNOM microscopy. Finally, we propose a compact architecture of an SNOM sensor with a microtip integrated on top of the VCSEL and report the preliminary results of fabrication of the integrated device.