Diamond milling of micro-optics
Diamond milling of micro-optics
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DOI：
10.1109/aes-m.2008.4444483
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发表时间：
2008-01-01
影响因子：
3.6
通讯作者：
Claudet, A. A.
中科院分区：
文献类型：
--
作者：
Sweatt, W. C.;Gill, D. D.;Claudet, A. A.
金刚石铣刀（一种微型端铣刀）可以切割直径小于0.5 mm的非球面透镜和反射镜。刀具具有二维形状，并围绕待切割表面的轴线旋转。当旋转工具插入衬底时，它将径向对称表面切割到亚微米精度。市售的圆形金刚石工具可以使用聚焦离子束修改为非球面形状。制造的例子将被呈现，并将描述微透镜阵列的光学性能。
A diamond mill (a tiny end mill) can cut aspheric lenses and mirrors with diameters smaller than 0.5 mm. The cutting tool has a two-dimensional shape and is spun about the axis of the surface to be cut. As the spinning tool is plunged into the substrate, it cuts a radially symmetric surface to sub-micron accuracies. Commercially available circular diamond tools can be modified to aspheric shapes using a focused ion beam. Fabrication examples will be presented and the optical performance of an array of micro-lenses will be described.