Four free parameter empirical parametrization of glow discharge Langmuir probe data.
Four free parameter empirical parametrization of glow discharge Langmuir probe data.
复制标题
辉光放电朗缪尔探针数据的四自由参数经验参数化。
DOI：
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复制
发表时间：
2008
影响因子：
1.6
通讯作者：
A. Azooz
中科院分区：
文献类型：
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作者：
A. Azooz
For the purpose of developing a simple empirical model capable of producing the electron energy distribution function (EEDF) from Langmuir probe I-V characteristics, a four parameter empirical equation that fits most Langmuir probe experimental data is suggested. The four free fitting parameters are related to the main plasma properties. These properties include the ion and electron saturation currents and the plasma electron temperature. This equation can be readily differentiated twice to give the EEDF according to the Druyvesteyn formula. Furthermore, a MATLAB platform based computer code based on this model yielding results for the plasma potential and all plasma parameters mentioned above is presented. The information given below can be used to write other computer codes for the same purpose in any other programming language.
